Electrical microfluidic pressure gauge for elastomer microelectromechanical systems
نویسندگان
چکیده
منابع مشابه
Electrical microfluidic pressure gauge for elastomer microelectromechanical systems.
We report on an electrical microfluidic pressure gauge. A polydimethylsiloxane microvalve closes at a characteristic applied pressure determined by the material's properties and the valve's dimensions. Hence, when the same pressure is applied to all valves of a heterogeneous valve array, some valves close while others remain open. The state of the array is combined with knowledge of the respect...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2007
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.2801008